Benefits Of Using A Controlled Evaporation vs. a Bubbler

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Vapors are normally created using a bubbler system. There are many household items that can be used to create a bubbler systems, but an advanced bubbler will cost thousands of dollars. Bubbler Systems still have their advantages when vaporizing very corrosive fluids. These systems can be used with corrosion resistant tubing from the liquid source to the customer process. While it has this advantage, it also has a list of disadvantages compared to the Controlled Evaporation Mixer.

Bubbler System Flow Scheme

What is a Controlled Evaporation  Mixer System?

The CEM System designed by Bronkhorst is a Liquid delivery system that can be applied to atmospheric or vacuum processes. This system is built with a (Thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device.

Features:
  • accurately controlled gas/liquid mixture
  • fast response
  • high reproducibility
  • very stable vapor flow
  • flexible selection of gas/liquid ratio
  • lower working temperature than conventional systems
  • optional control by PC/PLC (RS232/fieldbus)

Bubbler vs Controlled Evaporation Mixer

Bubbler vs Controlled Evaporation Mixer

Advantages of the CEM: Controlled Evaporation Mixer:

  • Fast evaporation Precursor only short period of time at higher temperature Well-suited for less stable precursors
  • Pressure and temperature in piping are of no importance
  • Precursor dosing via liquid flow controller
  • Precursor in a container at low temperature
Flow Scheme of Controlled Evaporation Mixing

The advantages of using a CEM instead of a traditional bubbler system are clear. Using a CEM system will save you money, increase operational efficiency, increased accuracy, and increased reproducibility.

Products used:

(CEM) Evaporator
Controlled Evaporator Mixer
  •  Accurately controlled gas/liquid mixture
  •  Fast response
  • High reproducibility
  • Very stable vapor flow

El Flow Select

El FLow Select Meter
  • High accuracy
  • Fast response, excellent repeatability
  • Optional Multi Fluid / Multi Range functionality
  • Virtually pressure and temperature independent
  • Compact design

Mini Cori Flow

Mini Cori Flow Meter
  • High accuracy, excellent repeatability
  • Fast response
  • Independent of fluid properties
  • Additional density and temperature output
  • Compact, rugged (IP65) design
  • Optional ATEX approval Cat.3, Zone 2

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