Flow Instrumentation for Semiconductor Manufacturers

• We offer a wide range of flow instrumentation for semiconductor manufacturers and other laboratory and research applications that require highly precise and accurate low flow control.
• Coriolis mass flow meters and controllers generally offer advantages over traditional thermal flow instrumentation by improving accuracy, precision, and repeatability.
• Our flow instrumentation can also be paired with a controlled evaporation mixer to create a vapor generation system, an alternative technology to bubbler systems, for highly uniform and controllable vapor delivery processes.

Coriolis Mass Flow Meters and Controllers for Semiconductor Manufacturing

The best flow instrumentation for semiconductor manufacturers are the precise and compact Coriolis mass flow controllers (MFCs). These flow meters work for both gases and liquids and uses the Coriolis measuring principle. Additionally, their design covers the needs of the low flow rate market. These MFCs offer multi-range functionality with factory calibrated ranges that can be rescaled by the user. Thus, they maintain the original accuracy specs.

This flow instrumentation features standard digital communication over RS232, with optional fieldbus communication. For example, PROFIBUS DP, DeviceNet, Modbus-RTU, FLOW-BUS. Furthermore, on the ML120 series, users can use PROFINET and EtherCAT. We also offer a handful of options for Coriolis flow meters and controllers in the mini CORI-FLOW Series, from Bronkhorst, as well as the mini CORI-FLOW ex d.

Coriolis flow meters and controllers are ideal for semiconductor manufacturers and improve the process of wafer cleaning with supercritical CO2. They offer zero surface tension (no wafer damage) as well as tunable density. In addition, they are environmentally friendly and create a recyclable process. Furthermore, they offer high accuracy (0.2% reading), great repeatability, a quick response on start, stop, and set-point changes, and do not require (re)calibration.

The CORI-FLOW Series enables easy replacement of traditional thermal mass flow controllers. CORI-FLOW flow controllers have the same footprint so they’re great for replacing old or less accurate instrumentation. Also, they are electrically similar, featuring the same options for analog and ethernet communication as popular competitive alternatives. Comparing them to thermal mass flow controllers, Coriolis flow controllers are more accurate, faster, and offer independence from fluid properties.

For layer deposition processes, Coriolis flow instrumentation is great option. They are superior for spray coating, laser dicing, FPD and solar cell coating, and other chemical vapor deposition processes. This includes metalorganic chemical layer deposition and atomic layer deposition. For these processes, the mini CORI-FLOW Series can offer excellent reproducibility: < (0.1% +zero stability) variation over 24 hours. They also offer quick vapor delivery due to a very fast response time: <0.5 seconds. These Coriolis flow meters and controllers are liquid and gas independent since they measure mass instead of volume, and do not require (re)calibration during operation or after changing fluids or gases.

Thermal Mass Flow Meters and Controllers for Semiconductor Manufacturers

Thermal mass flow controllers (MFCs) for gases are great for use in high purity applications. These MFCs offer multi-fluid and multi-range functionality with factory calibrations. In addition, operators can modify them with the aid of free configuration software. Moreover, they offer standard digital communication over RS232, optional fieldbus communication. This includes PROFIBUS DP, DeviceNet, Modbus-RTU, FLOW-BUS, PROFINET, and EtherCAT.

Digital Pressure Meters and Controllers

Digital pressure meters and controllers for gases and liquids are ideal for use with high purity applications for semiconductor manufacturers. Pressure meters and controllers from Bronkhorst offer unique, patent metal-to-metal seal construction with excellent resealing capability. They also offer standard digital communication over RS232 and optional fieldbus communication: PROFIBUS DP, DeviceNet, Modbus-RTU, FLOW-BUS, PROFINET and EtherCAT.

Unlike the IQ+ Series which is available as a separate IQ+FLOW flow meter/controller and IQ+FLOW pressure meter/controller, the all-new FLEXI-FLOW Series offers a compact design with all-in-one functionality for flow, pressure, as well as temperature. The FLEXI-FLOW Series is suitable for accurate measurement of flow ranges between 0-500 mln/min and 0-20 ln/min. It operates at pressures between vacuum and 17 bar(a). This flow instrument combines a swift and stable thermal mass flow sensor based on capillary MEMS technology with a precise and proven by-pass construction.

Due to its unique TCS Technology (Through Chip Sensor), the FLEXI-FLOW offers accurate mass flow measurement and virtual independence of variations in temperature and line pressure. In combination with integrated temperature and upstream and downstream pressure sensors, the embedded database for 22 gases allows accurate, on-board conversion.

Vapor Generation Solutions for Semiconductor Manufacturers

A vapor generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas, as well as a temperature Controlled Evaporation Mixing (CEM) device. These components can either be bought separately, or Process Solutions Corp. can build a custom, ready to use system to your exact specification.

These CEM-based vapor generation systems can generate (saturated) vapor flows within the range of 100 mln/min up to 10 ln/min and offer built-in control functions. As an option, these systems also offers trace heating temperature control to ensure vapor phase is maintained through the point of delivery. Our CEM systems can be applied for atmospheric or vacuum processes. Furthermore, they are capable of evaporating mixtures and even solids, dissolved in solvents. In addition, the Bronkhorst VDM Series is available as a control unit for a CEM system.