Stafford, Texas

IQ+FLOW Series, Compact Mass Flow Meters and Controllers

IQ+FLOW Series, Compact Mass Flow Meters and Controllers

Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5″, as for instance specified in the NeSSI system.

World’s Smallest Mass Flow Meter and Controller
Bronkhorst has developed the IQ+FLOW mass flow sensor, which uses micro solid state technology (MEMS) that reduces the footprint dimension to 0.75″, or half of conventional mass flow meters. The IQ+FLOW offers ultra compact flow and pressure meters and controllers.

  • Lowest range 0.2…10 mln/min
  • Highest range 0.1…5 ln/min

Description

  • Compact assembly ensures space efficiency
  • Economical solution, low cost of ownership
  • Analog or digital communication
  • Top-mount modules; easily accessible
  • Pre-tested “Plug and Play” manifold assemblies, reducing custom testing requirements

Applications

Examples of analytical applications based on the ultra compact modules with a footprint of 0.75” are:

Customer Specific Designs

Based on the micro system technology of IQ+FLOW Series, Bronkhorst also offers the possibility to combine functional modules on a compact manifold. See IQ+FLOW manifold solutions.

IQ+FLOW Series Compact Mass Flow Controllers and Meters Model Line-Up

The IQ+FLOW Series is well suited for precise measurement of dry, clean, non-corrosive, non-explosive gases and are typically recommended for integration in analytical and medical equipment. Communication with the devices can be either in analog mode or digital over RS232 or RS485.

Mass Flow Meters

IQF-100C
Ultra compact mass flow meter suited for flow ranges between 0.2…10 mln/min and 0.1…5 ln/min N2 -equivalent at operating pressures between vacuum and 10 bar(g).

IQFD-100C
Ultra compact, downported mass flow meter suited for flow ranges between 0.2…10 mln/min and 0.1…5 ln/min N2 -equivalent at operating pressures between vacuum and 10 bar(g).

Mass Flow Controllers

IQF-200C
Ultra compact mass flow controller suited for flow ranges between 0.2…10 mln/min and 0.1…5 ln/min N2 -equivalent at operating pressures between vacuum and 10 bar(g).

IQFD-200C
Ultra compact, downported mass flow controller suited for flow ranges between 0.2…10 mln/min and 0.1…5 ln/min N2 -equivalent at operating pressures between vacuum and 10 bar(g).