Vapor Generation System

This Vapor Generation System is an advanced alternative to traditional glass bubblers that improves process accuracy and repeatability. With an all in one design and a user-friendly touchscreen interface, users have unprecedented control over their vapor generation processes. It’s ideal for low flow applications such as use in research laboratories, deposition processes such as coatings, CVD, semiconductor manufacturing, and more.
cem-controlled-evaporation-vapor-generation-system-laboratory-bubbler-atomizer-vaporizer-process-solutions-corp
cem-controlled-evaporation-vapor-generation-system-laboratory-bubbler-atomizer-vaporizer-process-solutions-corp

Advanced Alternative to Glass Bubbler Systems

Controlled Evaporation Mixing System

Our vapor generation systems allow easy generation and precise control of vapor streams for a variety of applications. Through its user-friendly, color touchscreen interface, operators can effortlessly modify and control flow rates, setpoints, temperature, downstream heat tracing, stop/start functions, vapor concentration and composition, and more. 

This vapor generation system integrates a gas and a liquid flow meter and controller, a Bronkhorst Controlled Evaporation Mixer, and a process controller built in-house. Compared to traditional glass bubblers, generating vapor streams with this technology enables unprecedented control, accuracy, and repeatability while improving ease of operation.

  • data logging and WebMI capabilities
  • user-friendly, color touchscreen interface
  • continuous operation or totalizer mode for batching
  • Modbus interface, ethernet enabled
  • built in our UL Listed, ISO Certified work shop

This vapor generation system integrates a gas and a liquid flow meter and controller, a Bronkhorst Controlled Evaporation Mixer, and a process controller built in-house. Compared to traditional glass bubblers, generating vapor streams with this technology enables unprecedented control, accuracy, and repeatability while improving ease of operation. 

  • data logging and WebMI capabilities
  • user-friendly, color touchscreen interface
  • continuous operation or totalizer mode for batching
  • Modbus interface, ethernet enabled
  • built in our UL Listed, ISO Certified work shop

Common Uses of Vapor Generation Systems

  • Chemical Vapor Deposition (CVD) / MOCVD
  • dielectric (insulating) layer deposition
  • atomic layer depositions (ALD)
  • gas chromatograph and mass spec calibrations
  • generation of reference gas
  • aerospace and defense
  • food and beverage production
    • applying additives, dye, and flavorings
    • sterilization for aseptic packaging
  • manufacturing
    • semiconductors and solar cells
    • coating of metals and fabrics
    • humidity testing of materials
    • additive dosing: perfume, candy, vitamins, etc.
  • research and development
    • renewable fuels
    • fuel cell humidification and testing
    • hydrogen storage
    • defined humidification of gases
    • crystal breeding processes
    • sterilizing medical equipment

Controlled Evaporator Mixing (CEM)

Our unique and patented Controlled Evaporation Mixing (CEM) technology offers for accurate vapor flow control with analytical tracking. Traditional bubbler systems are often not capable of handling sufficient quantities of liquid with a low vapor pressure and perform in an imperfect way. Moreover, they cannot instantaneously provide vapor of a mixture of liquids with different vapor pressures. Our evaporation technology is fast, accurate, highly repeatable, and efficient.

  • accurately controlled gas / liquid mixture
  • fast response, high reproducibility
  • very stable vapor flow
  • flexible selection of gas / liquid ratio
  • handles water, solvents, and mixtures
  • lower working temperature than conventional systems
  • accurately controlled gas / liquid mixture
  • fast response, high reproducibility
  • very stable vapor flow
  • flexible selection of gas / liquid ratio
  • handles water, solvents, and mixtures
  • lower working temperature than conventional systems

Table Top or Rack-Mounted Vapor Generation Systems

Table Top / Desk Top

Our vapor generation systems are available in either table top / desk top models or as a rack-mounted unit. The table top unit can control one CEM system and allows users to easily move and store the vapor generator when not in use. This set up is ideal for research laboratories, universities, and other places where the vapor generation system may not be in constant use and/or where space is limited. 

vapor-generation-system-controlled-evaporation-mixer-cem-vaporizer-generator-process-solutions-corp

Rack Mounted Unit

The rack mount system is ideal for manufacturing environments and offers the same easy control. Unlike the table top unit, the rack mount CEM Controller can independently control up to three different vapor generation systems via three separate evaporator mixers and supplemental flow controllers for gases and liquids. In addition, the rack mount vapor generation system can control all three systems as part of a single system.

rack-mounted-controlled-evaporation-mixer-vapor-generation-system-process-solutions-corp

How this Vapor Generation System Works

This vapor generation system is a modular setup with the Controlled Evaporative Mixer (CEM) itself as the core component. A CEM is a mixer and vaporizer that uses heat to atomize a liquid, which is then mixed with a carrier gas. The carrier gas and liquid mixture is then heated and transformed into vapor phase, which can then be used for precise, low flow vapor control. And to feed the CEM with liquid and gas, the CEM is setup with a liquid flow meter with a control function and a gas flow controller. The liquid flow meter also uses the mixing valve of the CEM to control the liquid flow rate.

The gas serves as a mixing component and as a means of transport for the vapor and is therefore known as carrier gas. The mixing valve atomizes the liquid and adds it to the carrier gas, creating an aerosol, which is heated by the CEM until it transforms into a vapor. To monitor the internal temperature of the heat exchanger, the CEM incorporates a PT100 temperature sensor. Additionally, an internal safety switch prevents overheating of the heat exchanger, by interrupting the control signal as soon as the temperature reaches 392˚F.

The gas serves as a mixing component and as a means of transport for the vapor and is therefore known as carrier gas. The mixing valve atomizes the liquid and adds it to the carrier gas, creating an aerosol, which is heated by the CEM until it transforms into a vapor. To monitor the internal temperature of the heat exchanger, the CEM incorporates a PT100 temperature sensor. Additionally, an internal safety switch prevents overheating of the heat exchanger, by interrupting the control signal as soon as the temperature reaches 392˚F.

(Video) Vapor Generation System in Action

Advanced Vapor Generation System

The Controlled Evaporation System from Process Solutions Corp. offers highly precise vapor generation. It includes liquid and gas flow meters and controllers in addition to a vaporizer (atomizer) and mixing chamber to allow an accurate, repeatable vapor generation process. This vapor generation system is ideal for manufacturing processes such as semiconductors, as well as suitable for laboratory research processes and more. This Vapor Delivery system is an advanced alternative to traditional glass bubblers and is great for batching or continuous production and even offers remote monitoring and data logging capabilities.