EL-FLOW Prestige Series, Mass Flow Meters and Controllers

• high accuracy (standard 0.5% Rd plus 0.1% FS)
• rangeability in digital mode up to 1:150
• extremely fast and dynamic response
• multi-gas / multi-range functionality (100 selectable gases; scalable between 40%-120% or ordered capacity (FS value)
• pressure ratings 10 / 64 / 100 bar
• analog I/O-signals, RS232-connection; optional on-board fieldbus interface
• great variety of customized I/O options
• user configurable control characteristics
• robust metal housing

Thermal Mass Flow Meter with Fast Response to Improve Performance

The control performance of EL-FLOW Prestige Thermal Mass Flow Controllers is factory adjusted to swiftly respond to setpoint changes, without overshoot. Moreover, the controllers are highly resistant to mechanical shocks and pressure fluctuations, which may be caused by other devices consuming gas from the same source. As an option the MFCs can be tuned for extra fast response (settling times t98% down to 500 msec) or extra smooth control, depending on the requirements of the user’s process. The dynamic behaviour can also be tuned on site easily, by adjusting the controller speed settings via FlowTune, or by using our software tool FlowPlot. This free tool can also be used for device diagnostics or alarm and counter settings.

Select the I/O Options of Your Preference

Numerous input/output options can be offered through the programmable sub-D 9-pin connector. In addition to the various analog signal options and the standard RS232 communication, there are such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output. Furthermore Bronkhorst offers various integrated fieldbus options: CANopen, DeviceNet, PROFIBUS DP, PROFINET, Modbus RTU/ASCII, EtherCAT and FLOW-BUS. The latter is an RS485 based fieldbus, specifically designed by Bronkhorst for their mass flow metering and control solutions. For the convenience of customers working with LabVIEW (graphical software by National Instruments) Bronkhorst provides a certified plug & play instrument driver for instruments with FLOW-BUS interface.

Applications

• Analytical/environmental equipment
• Gas flow monitoring in food, chemical and petrochemical industries
• Gas consumption measurement in gas distribution systems for internal accounting purposes
• Detection of gas leakage through objects
• Semiconductor manufacturing
• Surface treatment installations
• Simulation of exhaust gas to test lambda probe (sensor)
• Water splitting for hydrogen production
• Calibration setup for mass flow devices