Stafford, Texas

EL-FLOW Select Series, Mass Flow Meters and Controllers

EL-FLOW Select Series, Mass Flow Meters and Controllers

EL-FLOW Select Series mass flow meters and mass flow controllers are thermal mass flow meters of modular construction with a laboratory style pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows.

  • Lowest range 0.014 to 0.7 mln/min
  • Highest range 8 to 1,670 ln/min

Truly Modular Design
The control valve design of the mass flow controller distinguishes itself from competitive designs by its truly modular construction and its ability to be field replaced or changed by the user without any adjustment. The standard valve is normally closed and is available up to Kv-values of 1.5. Normally opened valves can also be supplied. For high (differential) pressure applications, patented constructions enable us to handle high flows and/or pressures at differential pressures up to 400 bar in the EL-FLOW Select program, a capability which is unique in the market place.

Description

  • High accuracy (standard 0.5% Rd plus 0.1% FS)
  • Rangeability in digital mode up to 1:187.5
  • Fast response (down to 500 msec), excellent repeatability
  • Optional Multi-Gas / Multi-Range functionality: freely programmable ranges and gas types
  • Pressure ratings 64 up to 400 bar (Multi-Gas / Multi-Range functionality up to 10 bar)
  • Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
  • Electrochemical polishing of all surfaces
  • Compact, modular construction
  • Metal sealed and/or down-ported versions available
  • Best in class mean-time-between-failure (MTBF) data based on the IEC 61508 standard

Applications

Digital = Standard

All models of the EL-FLOW Select series are equipped with a digital pc-board, featuring self-diagnostics, alarm and counter functions, digital communication (RS232) and remotely adjustable control settings. These digital instruments from Bronkhorst offer great flexibility thanks to the “multibus” concept, whereby the instruments can be equipped with an on-board interface with CANopen, DeviceNet, EtherCAT, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, or FLOW-BUS protocol. More information about digital “multibus” communication.

Optional Multi Gas / Multi Range

EL-FLOW Select instruments can be offered with optional Multi Gas / Multi Range (MG/MR) functionality. This option offers greater flexibility for user selection of both flow ranges and gas types, maintaining high accuracy and turndown range for measurement and control. Thanks hereto, users of these instruments can rescale their instruments on site, saving time (and money) for mounting and dismounting. For the convenience of the user, Bronkhorst has developed an easy-to-use software tool called “FlowTune” for changing the configuration of EL-FLOW Select instruments with activated Multi Fluid / Multi Range option (available up to 10 bar operating pressure; to be specified at the moment of ordering).

EL-FLOW Select Series Gas Flow Meters and Controllers Model Line-Up

Mass Flow Meters (MFM) – PN100 (pressure rating 100 bar)

(For ranges of 200 or 400 bar rated MFMs see model number identification)

Model

min. flow

max. flow

F-110C

0.014…0.7 mln/min

0.06…9 mln/min

F-111B

0.16…8 mln/min

0.16…25 ln/min

F-111AC

0.4…20 ln/min

0.6…100 ln/min

F-112AC

0.8…40 ln/min

1.4…250 ln/min

F-113AC

4…200 ln/min

8…1670 ln/min

Mass Flow Controllers (MFC) – PN64 / PN100

(1* Kv-max = 6.6 x 10-2; 2* Kv-max = 0.4; 3* Kv-max = 1.5)

Model

min. flow

max. flow

F-200CV/F-210CV 1*

0.014…0.7 mln/min

0.06…9 mln/min

F-201CV/F-211CV 1*

0.16…8 mln/min

0.16…25 mln/min

F-201AV/F-211AV 1*

0.4…20 ln/min

0.6…100 ln/min

F-202AV/F-212AV 2*

0.8…40 ln/min

1.4…250 ln/min

F-203AV/F-213AV 3*

4…200 ln/min

8…1670 ln/min

Mass Flow Controllers (MFC) – PN200

(4* Kv-max = 1.65 x 10-3)

Model

min. flow

max. flow

F-220M 4*

0.2…10 mln/min

3…15 mln/min

F-221M 4*

0.3…15 mln/min

0.4…20 ln/min

MFCs for high-pressure / high-ΔP applications – PN400

Model

min. flow

max. flow

F-230M

0.2…10 mln/min

10…500 mln/min

F-231M

10…500 mln/min

0.2…10 ln/min

F-232M

0.2…10 mln/min

2…100 ln/min