Stafford, Texas

EL-FLOW Metal Sealed Series, Mass Flow Meters and Controllers

EL-FLOW Metal Sealed Series, Mass Flow Meters and Controllers

EL-FLOW Metal Sealed Series gas mass flow meters and controllers are characterized by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4″ face seal male (VCR) connections.

EL-FLOW Metal Sealed Mass Flow Meter and Controller with Fieldbus Interface
Today’s instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW design features Multi Gas / Multi Range functionality, providing (OEM) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides easy to use configuration software.

  • Lowest range 0.12 to 6 mln/min
  • Highest range 1 to 50 ln/min

Description

  • Resealable metal-to-metal outer seal construction (no rings)
  • Electropolished wetted parts
  • Cleanroom assembled
  • Analog and digital I/O, with optionally integrated interface to CANopen, DeviceNet, EtherCAT, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, or FLOW-BUS
  • High accuracy and repeatability
  • Stable control, even at varying process volumes

EL-FLOW Metal Sealed Series, Mass Flow Meters and Controllers Model Line-Up

Mass Flow Meters (MFM)

ranges based on N2

Model

min. flow

max. flow

F-111CM

0.1…5 sccm

1…50 slm

Mass Flow Controllers (MFC)

ranges based on N2

Model

min. flow

max. flow

F-201CM*

0.12…6 sccm

1…50 slm

* Kv-max = 6,6 x 10-2