µ-FLOW Mass Flow Meters and Controllers for Liquids

  • No moving parts
  • Thru-Flow measurement
  • Attitude insensitive
  • Fast and accurate measurement
  • Negligible dead-volume (sensor: 1,5…33 µl)
  • In combination with a control valve: continuous and stable control
  • Analog or digital: RS232, PROFIBUS DP, DeviceNet™, Modbus or FLOW-BUS
  • Stainless Steel sensor
  • NEW: 1000 bar (15000 psi) LFM for 100 up to 450 mg/h FS (based on H2O)


Measurement / Control of Ultra Low Flow Rates

µ-FLOW digital Liquid Flow Meters/Controllers for low flow ranges operate on a thermal, through-flow measuring principle. The instruments are equipped with a digital pc-board, featuring self-diagnostics, alarm and counter functions, digital communication (RS232), and a variety of Fieldbus options.

  • Lowest range of 5 … 100 mg/h
  • Highest range 0,1 … 2 g/h (fluids with thermal properties similar to H2O)


  • Pharmaceutical industry
  • Food industry (flavors, additives)
  • Biotechnical industry
  • Analytical laboratories
  • Evaporation processes (see CEM/VDM-system)
  • HPLC/UPLC applications

Liquid Flow Meters / Controllers

Liquid Flow Meters

Liquid mass flow meters of the µ-FLOW series is built around a stainless steel tube without any moving parts or obstructions. The heater/sensor assembly is arranged around the tube and constant power is applied to warm up the liquid inside the tube. Flowing liquid results in a shift of the temperature difference (ΔT) which is proportional to the mass flow. Due to the benefits of the applied sensor, the fluid will be warmed to a maximum of 5°C, thereby making the µ-FLOW Series suitable for fluids with low boiling points.

Liquid Flow Controllers

Flow control is achieved by integrating a control valve onto the body of the Liquid Flow Meter. This control valve has a purge connection to eliminate air or gas during start-up. The electronic control function forms part of the normal circuitry in the meter.